ЈLjؔ(jng)W(wng)(m.mjvf.cn)аӍ( ꐰ ӛ |)515Ї()MEMS܂a(chn)I(y)l(f)չl(f)eС
ӛߏİl(f)˽MһЇйИI(y)(ni)Ӱӿa(chn)I(y)ҪؼۣƂйȿٰl(f)չcʡƼdЇI(y)FƷl(f)չ̣524—25ڰ(lin)ekЇ()MEMS܂a(chn)I(y)l(f)չՈԺʿҡI(y)600˅
ЇMEMS܂a(chn)I(y)l(f)չИI(y)(ni)OӰIĮa(chn)I(y)ʢ2017ڰɹek˴δͻ߶IՈYfë7λԺʿӸ߷Փl(f)ּvͬr@δa(chn)I(y)ek͙C˺XCӿܸ֪g(chung)°l(f)չՓAWW|ϴWпԺϺϵy(tng)ȇ(ni)һУԺ˅Ӵ}l(f)ͻf(xi)ͬl(f)չУԺI(y)漰܂OӋbyԇ͑õĮa(chn)I(y)θh(hun)(ji)o8ӢMEMSA쾀չγa(chn)I(y)wϵͼۑB(ti)ͻλa(chn)I(y)@ʡ܇λa(chn)I(y)l(f)չekԴ܇ܾW(wng)(lin)܇“܇оf(xi)ͬ”(chung)ca(chn)I(y)l(f)չՓՈʡ(ni)ܾW(wng)(lin)܇܇Sһ̰l(f)܇dȺl(f)չڅݺЈϢI(y)_l(f)ЈĂṩ֧Ρ
δ_OՓքe@MEMScϵy(tng)Iչʾa(chn)ƷOӋgǰYӍИI(y)l(f)չǰ;@ΙC˺XCӿڃɂIܸ֪̽gͺоƬԓIоɹδl(f)չڅ;@ԴcܾW(wng)(lin)܇I̽ӑ܇ÂĿгɹԼ܇о֮gąf(xi)ͬl(f)չģʽÿՓքeՈ10λҵČҌWߺI(y)}l(f)ͨ^ǻ۵Ľײͬ\(chung)B(ti)ĽOӿa(chn)I(y)f(xi)ͬM
ֵһǣ_Ļʽl(f)ʡƼd(lin)ʡl(f)ίʡؔd8Tӡl(f)ġ֧ЇйȰl(f)չߡԓ߹14lͻ“”ںa(chn)I(y)ʡ(lin)漰ּ֧ӴͶ롢(chung)°l(f)չ˲Yl(f)չ傀ּƄĿI(y)˲ŵҪYԴۣ֧ΰЇйȴ^(q)|(zh)l(f)չLO܂Юa(chn)I(y)Ⱥ¸ߵ
˹ӲOʩ“(jng)Ԫ”Ҳ(lin)W(wng)Ҫ“Ԫ”֮һͰl(f)չ|(zh)a(chn)ҪAЇаl(f)֮һί۽MEMSgĵ܂Юa(chn)I(y)ӿҪؼƽ_OЇйʹ֮ɹSȫʮ܂a(chn)I(y)@^(q)
ǰȫЮa(chn)I(y)h(hun)ˇәCеϵy(tng)(MEMS)ط(lin)Ϲ̌ӜyԇgƼcʡCϵy(tng)(MEMS)ga(chn)I(y)(chung)оԺ22ʡаl(f)ƽ_@ʡ܂ƼɹD(zhun)ԇM˿Ҏ(gu)ģ70|Ԫ܂Юa(chn)I(y)l(f)չй넓(chung)@^(q)ӿ콨O(chung)@6ӢwMEMSAƽ_Լ8Ӣϵy(tng)Aаl(f)ƽ_аl(f)˾ЇHMˮƽ4ˇgwϵϵy(tng)QMEMSIg̰壬ȺȡøƼɹ800“”“϶”“m”“”20헇Һc̵“֮”ṩɞ(ni)и߶MEMSgca(chn)Ʒߵa(chn)I(y)ۼӿγ˱оԺо(lin)ϣſƼмҹ⡢ph(hun)ӵһИI(y)I܊I(y)γ܂вOӋ졢byԇ͑õa(chn)I(y)wϵɞȫʡΨһȫ锵(sh)ͬrм·MEMSAa(chn)ijȫ܂Юa(chn)I(y)PI(y)_200и¼gI(y)50ңʡόI(y)17wa(chn)I(y)θh(hun)(ji)a(chn)I(y)Ч@F(xin)(jng)Ҏ(gu)ģك|Ԫ
eǵMEMSԁʡίʡP֧ίĴƄн(jng)_^(q)ץʡcЇI(y)Fйȵđ(zhn)ԙCMЇй넓(chung) ^(q)O|(zh)ЧһͶY3.5|ԪĂйȹԼgƽ_(һ)\о(lin)ƳɞȫʡMEMSII(y)ϣſƼϽƄ(chung)oй“һ@c”ѼI(y)100γаl(f)OӋbyԇÞһwȫa(chn)I(y)朲2023ꌍF(xin)Ҏ(gu)I(y)a(chn)ֵ51|Ԫ
ԓЌԼ֔Lcߘ˜ʡ|(zh)ô헻I乤ѵЇ()MEMS܂a(chn)I(y)l(f)չkøɫӰгЧɿоwNȫa(chn)ֵǧ|Įa(chn)I(y)Ⱥγɇ(ni)һ֪Ї()йע
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